Inficon IC/5 Thin Film Deposition Controller manuals

Owner’s manuals and user’s guides for Equipment Inficon IC/5 Thin Film Deposition Controller.
We providing 1 pdf manuals Inficon IC/5 Thin Film Deposition Controller for download free by document types: User Manual

Inficon IC/5 Thin Film Deposition Controller User Manual (312 pages)

Brand: Inficon | Category: Equipment | Size: 10.36 MB |

OPERATING MANUAL

01/16/96

Warranty

Table Of Contents

TOC - 2

Chapter 2

Chapter 3

Operation

TOC - 3

TOC - 4

Chapter 7

Remote Communications

TOC - 5

TOC - 6

Chapter 11

Installation and Interfaces

Chapter 12

Calibration Procedures

Chapter 13

TOC - 8

Appendix A

Material Table

Chapter 1

1.2 Instrument Safety

1.2.3 Earth Ground

1.2.4 Main Power Connection

1.4 IC/5 Specifications

1.4.3 Set-Up Parameters

1.4.4 Display

1 - 11

1.4.6 Logic Processing

1.4.7 Relays / Inputs

1.4.8 Remote Communications

1.4.9 Accessories

1.4.10 Power

1 - 14

1.5 Unpacking and Inspection

1.6.3 Optional Accessories

1 - 17

1 - 18

1 - 19

1 - 20

2.1.1 Monitor Crystals

Frequency (in MHz)

2.1.3 Z-match Technique

crystal and

2.1.5 ModeLock Oscillator

2.1.6 Auto Z-match Theory

2.1.7 Control Loop Theory

[controller] [process]

2 - 16

3.2 Rear Panel Interfaces

3.3 Displays

(See Figure 3-5.)

3.3.2 Operate Display

3 - 10

3 - 11

3 - 12

3.3.3 Sensors Display

3 - 14

3 - 15

3 - 16

3 - 17

3 - 18

3 - 19

3.3.7 Program Displays

3 - 21

Figure 3-13 I/O Display

3.4 Process Description

3.4.2 Executing a Process

See Figure 3-15 and

Figure 3-16

3 - 25

3.4.4 Co-deposition

3.4.5 Automating a Process

3 - 28

3 - 29

3.5 State Descriptions

3.6 Special Features

3 - 33

3 - 34

3 - 35

3.6.3 Auto Z

3.6.5 Rate Watcher

3.6.6 Hand-Held Controller

3.6.7 Test Mode

3.6.8 Floppy Disk (Optional)

3.6.9 Lock and Access Codes

3.6.10 Datalog

3 - 42

Chapter 4

Material Set Up

Figure 4-3 Material Library

TOOLING TF

100

IC/5 Operating Manual

101

IC/5 Operating Manual

102

4 - 10

104

4 - 11

105

4 - 12

106

4 - 13

107

4 - 14

108

4 - 15

109

4 - 16

110

Chapter 5

111

Process Set-Up

111

5.2 Process Definition

112

5.2.1 Layer Editing

113

5.5.1 Skip Deposit

119

5 - 10

120

Chapter 6

121

I/O Logic Statement Set-Up

121

Figure 6-4

125

6.3 ’IF’ Event Definitions

126

6 - 10

130

6 - 11

131

6 - 12

132

6 - 13

133

6 - 14

134

6.5 Logic Statement Example

135

6.6 I/O Map Directory

136

6.7 Define User Messages

137

6 - 18

138

6.8 Floppy Disk

139

6 - 20

140

6.9 Error Messages in I/O

141

Logic Statement Set-Up

141

6 - 22

142

Key Function Description

144

7.3 Error Messages in

146

7.5 Physical Connections

146

7.5.1 RS-232C Serial Port

147

7.5.2 IEEE488 Port

149

7.6 Message Protocols

150

(command)<ACK>

151

(response)<ACK> or

151

(nrc)<NAK>

151

7.7 INFICON Standard

152

Communication Commands

152

7.7.3 Query Commands

153

7 - 12

154

7 - 13

155

7 - 14

156

7 - 15

157

7 - 17

159

7.7.4 UPDATE Commands

160

7 - 19

161

7 - 20

162

7 - 21

163

7 - 22

164

7 - 23

165

7 - 25

167

7 - 26

168

7 - 27

169

7.7.5 STATUS Commands

170

IPN 074-237AE

171

7 - 30

172

7 - 32

174

7 - 34

176

7 - 36

178

7.7.6 REMOTE Commands

180

7 - 39

181

7 - 40

182

Host Programs

183

7 - 42

184

7.8.2 Sample Host Programs

185

7 - 44

186

7 - 46

188

Chapter 8

189

Source/Sensor Set-Up

189

8.2 Source/Sensor Navigation

190

8.3 Source Parameters

191

8.4 Sensor Parameters

194

8 - 10

198

Chapter 9

199

Utility Set-Up

199

9.2 Utility Navigation

200

9.3 Utility Parameters

200

Chapter 10

207

Applications

207

Multiple Sensor Operation

208

10 - 3

209

10.2 Trend Analysis

210

10 - 5

211

10 - 6

212

10 - 7

213

10.3.1 System Equipment List

214

10 - 9

215

10.3.2 I/O Set-Up

216

10 - 11

217

10 - 12

218

10 - 13

219

Figure 10-5 I/O Map Board 2

219

10 - 15

221

Figure 10-6 Statement 1

221

Figure 10-7 Statement 2

221

10 - 16

222

10 - 18

224

10 - 20

226

10 - 22

228

10 - 23

229

Figure 10-35 Statement 31

229

Figure 10-36 Statement 32

229

Figure 10-37 Statement 33

229

10 - 24

230

10 - 26

232

11 - 2

234

11.1.2 Sensor Installation

235

11 - 4

236

11 - 5

237

11 - 6

238

11 - 8

240

11.3.2 Voltage Selection

241

11.3.3 Routing XIU Cables

242

11 - 11

243

I/O Board #1 I/O Board #2

244

I/O Board #3

244

11 - 13

245

11 - 14

246

12.3 Determining Tooling

248

12 - 3

249

For Co-Deposition

250

12 - 5

251

12.5.1 Procedure Set-Up

252

12 - 7

253

12 - 8

254

12 - 10

256

12.6 AutoTuning

257

12.6.1 AutoTune Parameters

258

12 - 13

259

AutoTune Description

260

12 - 15

261

12 - 16

262

12 - 17

263

12 - 18

264

13 - 2

266

13 - 3

267

13 - 4

268

13 - 5

269

13 - 6

270

13 - 7

271

13 - 8

272

13 - 9

273

13 - 10

274

13.2 Troubleshooting Guide

275

13 - 12

276

13 - 13

277

13 - 14

278

13 - 15

279

13 - 16

280

13 - 17

281

13 - 18

282

13 - 19

283

13 - 20

284

13 - 21

285

13 - 22

286

13.3 Replacing the Crystal

287

13 - 24

288

13.3.3 Bakeable Sensor

289

13.3.4 Sputtering Sensor

290

13.3.5 Crystal Snatcher

291

13.3.6 CrystalSix

291

13.4 Crystal Sensor Emulator

292

IPN 760-601-G1 or 760-601-G2

292

13.4.1 Diagnostic Procedures

293

13 - 31

295

13.4.2 % XTAL Life

296

13 - 33

297

13.4.4 Specifications

298

A - 10

308

Index - 1

309

Index - 3

311

Index - 4

312

More products and manuals for Equipment Inficon

Inficon IC/5 Thin Film Deposition Controller manuals

Inficon IC/5 Thin Film Deposition Controller User Manual (312 pages)

Table of contents

More products and manuals for Equipment Inficon

Inficon devices

Models	Document Type
XTM/2 Thin Film Deposition Monitor	User Manual INFICON XTM/2 Thin Film Deposition Monitor User Manual, 140 pages
Composer Gas Concentration Controller	User Manual INFICON Composer Gas Concentration Controller User Manual, 206 pages
Composer Elite Gas Concentration Monitor	User Manual INFICON Composer Elite Gas Concentration Monitor User Manual, 152 pages
Maxtek PM-700 Plating Monitor	User Manual INFICON Maxtek PM-700 Plating Monitor User Manual, 83 pages
Probe Maintenance	User Manual INFICON Probe Maintenance User Manual, 1 pages
CHC-15 Crystal Holders GC-15 Glass Cell	User Manual INFICON CHC-15 Crystal Holders GC-15 Glass Cell User Manual, 17 pages
PLO-10i Phase Lock Oscillator	User Manual INFICON PLO-10i Phase Lock Oscillator User Manual, 74 pages
PGD400 Pirani Gauge Display	User Manual INFICON PGD400 Pirani Gauge Display User Manual, 36 pages
RQCM - Quartz Crystal Microbalance Research System	User Manual INFICON RQCM - Quartz Crystal Microbalance Research System User Manual, 102 pages
VGC403 Three-Channel Measurement and Control Unit	User Manual INFICON VGC403 Three-Channel Measurement and Control Unit User Manual, 56 pages
VGC403 Control Unit Installation	User Manual INFICON VGC403 Control Unit Installation Benutzerhandbuch, 2 pages
VGC401 Single-Channel Controller	User Manual INFICON VGC401 Single-Channel Controller User Manual, 94 pages
VGC403 Three-Channel Measurement and Control Unit	User Manual INFICON VGC403 Three-Channel Measurement and Control Unit Benutzerhandbuch, 56 pages
BCG450 ATM to Ultra-High Vacuum Triple Gauge	User Manual INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge User Manual, 60 pages
BCG450 ATM to Ultra-High Vacuum Triple Gauge	User Manual INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge User Manual, 4 pages
VGC401 Single-Channel Controller	User Manual INFICON VGC401 Single-Channel Controller Benutzerhandbuch, 94 pages
BCG450-SD ATM to Ultra-High Vacuum Triple Gauge (D	User Manual INFICON BCG450-SD ATM to Ultra-High Vacuum Triple Gauge (DeviceNet) User Manual, 40 pages
BCG450-SP ATM to Ultra-High Vacuum Triple Gauge (P	User Manual INFICON BCG450-SP ATM to Ultra-High Vacuum Triple Gauge (Profibus) User Manual, 4 pages
BPG402-Sx ATM to Ultra-High Vacuum Gauge	User Manual INFICON BPG402-Sx ATM to Ultra-High Vacuum Gauge User Manual, 4 pages
BCG450-SP ATM to Ultra-High Vacuum Triple Gauge (P	User Manual INFICON BCG450-SP ATM to Ultra-High Vacuum Triple Gauge (Profibus) User Manual, 52 pages