Inficon MDC-360 Thin Film Deposition Controller manuals

Owner’s manuals and user’s guides for Equipment Inficon MDC-360 Thin Film Deposition Controller.
We providing 1 pdf manuals Inficon MDC-360 Thin Film Deposition Controller for download free by document types: User Manual


Table of contents

MODEL MDC-360

1

Table of Contents

4

Table of Figures

9

List of Tables

10

1. GENERAL DESCRIPTION

11

GENERAL DESCRIPTION 1-4

14

1.3.8 SENSOR PARAMETERS

15

1.3.9 SOURCE PARAMETERS

15

GENERAL DESCRIPTION 1-5

15

1.3.10 RECORDER PARAMETERS

16

1.3.12 OTHER

16

GENERAL DESCRIPTION 1-6

16

GENERAL DESCRIPTION 1-7

17

2.3.8 ARROW KEYS

22

2.3.9 PROGRAM KEY

22

2.3.10 ALPHANUMERIC KEYBOARD

23

3.3.3 PROCESS PARAMETERS

28

3.6.1 SOURCE-SENSOR BOARD

29

3.6.2 DISCRETE I/O BOARD

29

3.6.3 IEEE-488 OPTION BOARD

29

4.1.4 COPYING AND DELETING

34

4.1.5 PASSWORD PROTECTION

34

4.2.1 UTILITY SETUP

36

4.2.2 DAC SETUP

36

4.2.3 SOURCE SETUP

36

SENSOR SETUP

39

4.2.4.1

41

4.2.6 DISPLAY SETUP

42

4.2.7 MATERIAL SETUP

42

4.2.7.1 POWER RAMPS

43

AI C G=⋅= ⋅

50

4.3.3.2 PROGRAM INPUTS

56

5. OPERATING THE MDC-360

75

Displays the current

77

OPERATING THE MDC-360

79

5-8 OPERATING THE MDC-360

82

5.7.7 MANUAL

82

5.7.8 SIMULATE

82

5-12 OPERATING THE MDC-360

86

5.9.1.24 CHANGE CRYSTAL

86

5.9.1.25

86

ATTENTION ACTION

86

TICS 7-4

98

TICS 7-6

100

INPUT/OUTPUT CHARACTERIS

100

INPUT/OUTPUT CHARACTERISTICS

101

8. CONTROLLER INSTALLATION

103

8-3CONTROLLER INSTALLATION

105

8.3.7 DISCRETE INPUT/OUTPUT

105

CONTROLLER INSTALLATION

106

CONTROLLER INSTALLA

108

CONT 8-9

111

9. SYSTEM INSTALLATION

113

SYSTEM INSTALLATION

114

9.3.1 INSTALLATION

114

9-3SYSTEM INSTALLATION

115

10. THEORY OF OPER N

121

10-3THEORY OF OPERATION

123

10.4 RATE CALCULATION

124

10.5 RATE CONTROL

124

10.6 EMPIRICAL CALIBRATION

124

10-5THEORY OF OPERATION

125

10.6.2 TOOLING FACTOR

125

10.6.3 ACOUSTIC IMPEDANCE

125

THEORY OF OPERATION

126

10-7THEORY OF OPERATION

127

11. COMPUTER INTERFA

129

11-2 COMPUTER INTERFACE

130

11.6 DATA TYPES

131

1.7 MESSAGE R EIVED STATU

131

Receive Code Description

131

INSTRUCTION SUMMARY

132

COMPUTER INTERFACE

133

11-6 COMPUTER INTERFACE

134

Decimal Pt

135

11-8 COMPUTER INTERFACE

136

11-10 COMPUTER INTERFACE

138

11-12 COMPUTER INTERFACE

140

11-14 COMPUTER INTERFACE

142

11-16 COMPUTER INTERFACE

144

11-18 COMPUTER INTERFACE

146

33. Internal Command

148

11-22 COMPUTER INTERFACE

150

COMPUTER INTERFACE 11-24

152

12. REPAIR AND MAINTENANCE

155

REPAIR AND MAINTENANCE 12-2

156

REPAIR AND MAINTENANCE

157

13. APPENDIX A

159

Color Signal Pin Number

160

14.6 ACTIONS

169

Figure 15-1 Menu Map

173





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